The crash happened at the intersection of Roosevelt Road and Cicero Avenue at about 4:49 a.m.
Cicero police said a special operations unit was investigating activity related to a rash of burglaries of local gaming establishments.
During their investigation, one of the the suspected vehicles pulled into a strip mall parking lot at 16thand Cicero Avenue.
As police followed, the driver of a dark Acura SUV fled northbound on Cicero Avenue.
As Cicero police tried to catch up, they crashed into a turning semi and two other cars.
Chopper 7 was over the scene at about 6:30 a.m. where three vehicles had extensive damage.
The suspect in the Acura fled north on Cicero Avenue.
Three civilians were hurt in the crash, they were taken to Loyola, Mt. Sinai and MacNeal hospitals with non-life-threatening injuries, police said.
Two police officers were hurt in the crash and were taken to Mt. Sinai hospital, police said.
One of the officers was in surgery, police said.
"Please keep our Cicero Police officers in your thoughts and prayers," a Town of Cicero spokesperson said. "We ask our community to come together in prayer for their recovery, for the civilians involved, and for the safety of all those who serve. Thank you to our brave officers who put their lives on the line every day."
The crash remains under investigation by the West Suburban Major Crimes Task Force.
The CTA said #54 Cicero buses were rerouted in both directions via Cicero, Harrison, Kostner, 16th and Cicero due to the police activity.